A core part of the Australian vacuum services portfolio is the supply of high-quality nanotechnology tools such as (pulsed laser) chemical vapor deposition (CVD) systems, MBE and magnetron sputtering as well as atomic layer deposition systems. With supply also comes education, our customers are generally trained on new Installations. However, we do offer courses on all types of deposition.
- Magnetron sputtering processing
- Electron beam gun deposition
- ALD Atomic layer deposition
- PECVD and CVD growth e.g. diamond
- Crystal growth (MBE) of compound semiconductors
- Atomic layer deposition (ALD) techniques and systems
- RIE reactive ion etch for highly anisotropic geometries
- Thermal evaporation using resistive heating
- Plasma cleaning / surface treatment with Argon and Oxygen