INFICON developed HAPSITE® ER person-portable Gas Chromatograph-Mass Spectrometer (GC/MS) to help responders quickly identify and accurately quantify a broad range of chemicals in unknown samples to provide actionable data, in order to protect the health and safety of themselves and others. And now, we're taking the HAPSITE family to the next level with improved analytical capabilities and ease of use.
• Detects and quantifies heavier analytes/SVOCs
• Detects narcotics
• Faster results
• Faster clear-down time
• Split/split-less injection port
• Easily DECONABLE
• MIL-SPEC COTS batteries
• HAPSITE Service Module compatibility
• Uses HAPSITE carrier gas canisters
• Faster detection/quantification of traditional CWAs
• Results in under 5 minutes
• Chemical Identification
Inficon produce Drop in vacuum gauges for every manufacturer see as below contact Austrlian vacuum for further information.
High Precision Capacitance Manometers and Diaphragm Switches:
Product Line Measuring Principle =INFICON Type
722 (MKS), 730 (SETRA) Ambient Capacitive Gauges = Porter CDG020D
626, AA01,623 (MKS), CTR 100 (Leybold) Ambient Capacitive Gauges = SKY CDG025D
627, E27, 727 (MKS), CTR 101 (Leybold) 45°C Capacitive Gauges = SKY CDG045D
628, E28, 728, 625 (MKS) 100°C Capacitive Gauges = SKY CDG100D
629 (MKS) 150/160°C Capacitive Gauges = SKY CDG160D
631 (MKS) 200°C Capacitive Gauges = SKY CDG200D
AA06, 690A (MKS) Reference capacitive gauges = Cube CDGsci
727 (MKS) 45°C Capacitive Gauges = Edge CDG45D
728 (MKS) 100°C Capacitive Gauges = Edge CDG100D
DI 2000 (Leybold) Capacitive DI Sensors = DI 200 / DI 2000
51A, 51B (MKS) Vacuum switches = VSA 200
41B (MKS) Vacuum switches = VSD 200
PS 115 (Leybold) Vacuum switches = VSC150A
PS 113A (Leybold) Vacuum switches = VSA100A
Wide Range Thermal Conductivity - and Ionization Gauges & Controller:
Product Line Measuring Principle =INFICON Type
275 Mini-Convectron® (MKS/ GP) analog or RS485 Convection enhanced Pirani = PGE500 RS485/ analog
275 Mini-Convectron® (MKS/ GP) DeviceNet Convection enhanced Pirani = PGE500 DeviceNet
275 Convectron® (MKS/ GP) passive sensor Convection enhanced Pirani = PGE050
TTR 91/ TTR 96 (Leybold) Pirani = PSG500, PSG502
925 MicroPirani™ (MKS) MEMS-Pirani = PSG500, PSG502
TTR 91 N/ TTR 96 N (Leybold)
TTR 91 R (Leybold) Pirani = PSG500, PSG550
TTR 911, TTR 916 (Leybold) Pirani = PSG550, PSG552
925 MicroPirani™ (MKS) MEMS Pirani = PSG550, PSG552
TTR 911 N, TTR 916N (Leybold)
910 DualTrans™ MicroPirani™ (MKS) MEMS Pirani/ Piezo = PCG55x
TTR 101 N (Leybold)
901P MKS MicroPirani™-Piezo (MKS) MEMS Pirani/ ATM Piezo = PCG55x
ITR 90 (Leybold) Hot Ion/ Pirani = BPG400
ITR 200 (Leybold) Hot Ion/ Pirani = BPG402
355 Micro-Ion® (MKS) Hot Ion = BAG302
392 Micro-Ion® Plus (MKS) Hot Ion/ Pirani = BPG400
392 Micro-Ion® Plus (MKS) Hot Ion/ Pirani = BPG402
390 Micro-Ion® ATM (MKS) Hot Ion/ Pirani/ Piezo/ ATM Piezo = BCG450
PTR 225 analog (Leybold) Cold Cathode (Penning) = PEG100
PTR 225 analog (Leybold) Cold Cathode (Penning) = MAG500
PTR 225 N (Leybold) Cold Cathode (inv. Magnetron) = PEG100, MAG500
PTR 237 analog/ DeviceNet (Leybold) Cold Cathode (Penning) = PEG100, PEG100-D
PTR 90 (Leybold) Cold Cathode (inv. Magnetron) = MPG400
500, 903 (MKS) Cold Cathode = MAG500, MPG500
971B UniMag™, 971B DualMag™ (MKS) Cold Cathode/ Pirani = MAG500, MPG500
974B QuadroMag™ (MKS) Cold Cathode/ Pirani/ Piezo/ ATM Piezo MPG500
PTR 90 N (Leybold) Cold Cathode/ Pirani MPG500
Center One, Two, Three (Leybold) Active Gauge Controller = VGC501, VGC502, VGC503
Precision vacuum measurement from 0.01mTorr to 2 bar
INFICON ceramic capacitance diaphragm gauges (CDG) are designed for demanding, highest accuracy (0.15%) applications in the vacuum industries. The corrosion resistant ultra pure alumina sensor guarantees superior performance and best long term span stability, high accuracy and years of maintenance free life time. INFICON offers a full line of CDGs starting with low priced Porter status gauges, ranging to world fastest CDG Stripe with less than 1ms measuring time, 200°C process gauges or the reference gauge Cube showing excellent stability. A large selection of flanges and interfaces, for example EtherCAT, make them the best choice for easy and cost effective integration.
Compact and rugged vacuum and differential pressure switches round up the product offering.
Dedicated Instruments Proven in the Field
In various market segments – from the Automotive industry to Refrigeration and Air Conditioning technology to the manufacture of Semiconductor components and Solar technology – our leak detectors provide the highest quality and increased process safety. With an INFICON leak detector, the time and money required for maintenance and troubleshooting of your products will be reduced to a minimum and your ongoing operating costs will be significantly less. An INFICON leak detector, for example, is so highly sensitive that a release of less than one millionth of a gram of gas can be shown to be a leak.
Your Reliable Partner from Applications Support to Service
A specially assigned contact person who knows the requirements of your industry will work with you to define the desired specifications. After installation of your new leak detector, we support you with world-class service and troubleshooting expertise, if needed, to get the most out of your leak detector. An INFICON leak detector is optimized for its specific leak testing application. Products and services are continuously optimized in close cooperation with our experts. This also includes the evaluation of new leak testing products at the customer’s site. INFICON leak detectors not only are at the forefront of technology and offer the highest performance, but are also very easy to operate. With an INFICON leak detector, long training periods or errors in handling are simply a thing of the past.
Benefits of INFICON Leak Detectors
INFICON provides the most comprehensive and advanced Intelligent Manufacturing Systems for the electronics manufacturing industry. Our FPS and FabGuard® product lines are proven to increase capital productivity, labor efficiency, and overall factory efficiency by presenting critical information, automating complex decision making, and delivering industry-leading execution capability - all in real time.
INFICON Crystals are 100% Tested for Accuracy and Reliability
The stability and longevity of a crystal affect not only the accuracy of rate and thickness measurements, but more importantly the successful completion of the process being controlled. INFICON quartz crystals offer proven stability and reliability-proven by millions of successful process runs with a wide range of materials, applications and industries.
Our 6 MHz crystals are used with all INFICON controllers and monitors. Our 5 MHz crystals can be used with 5MHz instruments only; and are not compatible with some INFICON instruments. The 6 MHz and the 5 MHz crystals are available in gold, silver, or alloy electrodes and come in a variety of packages depending on your needs.
The INFICON clean room quartz crystal package enables convenient dispensing of the crystals directly from the package to the sensor, minimizing operator handling and risk of contamination. To make the crystal package more cleanroom-friendly, we eliminated the paper and foam inserts and made the packages stackable for easy storage.
The ever increasing price of silicon wafers and demand for finished products means that scrapped wafers cost more than ever before. Thus, understanding your process and monitoring for defects has become a much higher priority in semiconductor fabrication centers. The Transpector MPH Gas Analysis System is designed to unlock your process with industry leading performance for all of your gas analysis applications to help maximize chip yields and minimize tool downtime. Combined with a low overall cost of ownership and high mean-time-between-failures, Transpector MPH helps your bottom line more than any other residual gas analyzer (RGA) on the market.
INFICON has leveraged its expertise in gas analysis process control equipment to create an RGA with industry-leading data collection speed, minimum detectable partial pressure and signal-to-noise ratio. All this, without sacrificing any of the reliability you have come to expect from INFICON Transpector Gas Analyzers.
Arcing during plasma processing can result in target and chamber damage leading to substrate damage and particle creation. As feature sizes decrease, microelectronic devices become increasingly susceptible to arc-induced damage. Arcing can occur in any plasma assisted process such as ionized Physical Vapor Deposition (iPVD), Plasma Enhanced Chemical Vapor Deposition (PECVD) and Etch. The INFICON Sion Arc Detector provides a crucial first line of defense. Sion makes it possible to detect micro-arcs quickly and react to them before significant damage or scrap occurs. The system provides real-time detection and analysis of plasma micro-arcing events.
INFICON market-leading thin film deposition controllers, monitors and QCM measurement instruments control deposition rate and thickness of the most complex processes with unsurpassed measurement speed and precision. Enhanced software and logic I/O features allow our thin film deposition controllers/QCM measurement instruments to be fully integrated into the vacuum system for automatic process control. To control less complex processes, use INFICON economical, precision controllers, monitors and QCM measurement instruments that measure films with 100 times more precision than conventional techniques.
The typical QCM system includes a quartz crystal which is the sensing device, a crystal holder (sensor) which holds the crystal and provides electrical connections to the crystal, an oscillator (or XIU for ModeLock instruments) which drives the crystal, and a controller or monitor that reads the deposition rate and thickness and stores process parameters. INFICON provides both complete QCM systems as well as individual components designed for research applications.
From the simplest to the most complex process, INFICON provides superior value.
A deposition controller allows rate control of your deposition process using a QCM sensor. From the most basic to the most feature laden, INFICON offers a deposition controller to meet your needs.
EIES is an alternative rate/thickness monitoring technology for certain applications where a QCM is not ideal.
The inficon leak detection and gauges and range ofcontrollers offer superior accuracy and reliability in a compact design, enabling simple system integration along with a single point of access for multiple pressure readings across the complete range of measurement technologies. A full range of INFICON cables are available to facilitate ease of integration.
Our Controller product portfolio for operating Active Vacuum Gauges comprises a single channel low cost gauge Display (PGD400), through to a range of single, dual and three channel multi functional economical Controllers (VGC50x). The illuminated multi-digit display indicates each channel and up to six integrated set points, independently. Each channel can be used independently or combined with other channels to enable optimum price to performance ratio over the complete vacuum range, with minimal integration.
For operating our new line of Passive Vacuum Gauges we offer a single channel Pirani Gauge Controller (VGC031) and our brand new three channel Hot Ion & Pirani Gauge Controller (VGC083).
The NEW INFICON Vacuum Gauge Controller VGC083 is designed for use with passive gauge heads BAG05x and PGE050 in a fixed combination of two PGE050 gauges and one BAG05x gauge. The VGC083 controlls and monitors vacuum pressure from ATM down to 2.7×10-11mbar using the BAG and PGE gauges. Six (6) single-pole relays assignable to any of the gauge heads along with RS232 and RS485 interfaces aid in system integration. The rugged industrial design of the VGC083 in combination with the passive gauge heads provide a reliable and economical system for vacuum applications requiring a wide vacuum measurement range.
We supply all of Australia including Sydney Brisbane Melbourne Perth and Adelaide
The INFICON wide range vacuum gauges offer superior accuracy and reliability in compact designs. Four physical technologies cover the whole range of vacuum from ultra-high vacuum up to atmosphere.
The INFICON Pirani technology enables cost effective measurement in the low and medium vacuum range. The INFICON miniature capacitance diaphragm technology enables precise measurement in the low vacuum range, whereas the ultra- and high-vacuum ranges are covered by the hot or cold ionization technologies.
Each measurement technology is available as a stand-alone sensor or combined with complementary measurement technologies to enable optimum price to performance ratio over the complete vacuum range.
Everything from handheld gas detection through ro full residual gas analyser.
The INFICON Augent™ Optical Plasma Gauge
Australian Vacuum Services Pty Ltd
Phone: +61 (0) 2 8626 6495 / Mobile +61 (0) 4 2361 3086
3/25 Jenner Street | Baulkham Hills | NSW 2153 | Australia
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New Zealand customers also welcome