Hexisense SA makes instrumentation based on gallium nitride semiconductors, the same tough material that powered the LED lighting revolution. Our first offering, OxyGaN, is built around a chip that combines a traditional total pressure sensor with a proprietary oxygen chemical sensor. Together, these sensors measure total pressure, oxygen partial pressure, and water vapor partial pressure in vacuum manufacturing.
OxyGaN is a drop-in replacement for a pressure gauge that provides both chemical and physical measures of vacuum quality from high to rough vacuum — where mass spectrometers would require differential pumping — at the price of a pressure gauge. These two signals improve the return-on-investment for expensive process equipment by:
OxyGaN’s integrated leak detection capability is for application in the following industries:
Check out this great video